KEYENCE VR-5200 3D Measurement System

Description

KEYENCE VR-5200 Wide-Area 3D Measurement System Head

The KEYENCE VR-5200 is the measurement head for the KEYENCE VR-5000 Wide-Area 3D Measurement System. It is designed for high-precision, non-contact 3D measurement of surfaces, contours, dimensions, and height differences.

The VR-5200 uses white LED measurement lighting, a 4-megapixel monochrome CMOS sensor, and double-telecentric optics to capture detailed 3D measurement data. KEYENCE specifies measurement accuracy down to ±2.0 µm for width measurements and ±2.5 µm for height measurements in specified measurement conditions.

The system is particularly suitable for precision manufacturing and quality-control applications where repeatable, non-contact measurement of small components and surface features is required.

Main Benefits

High-precision non-contact 3D measurement
Wide-area surface measurement
Submicron display resolution
High-resolution optical measurement
Automated XYZ measurement
Suitable for dimensional inspection
Surface profile and contour measurement
Height and step measurement
Suitable for industrial quality control
Motorized measurement stage
Supports automated measurement and stitching

Key Features

VR-5200 measurement head
White LED measurement light source
Red, blue, and green LED ring observation lighting
4-megapixel monochrome CMOS sensor
Double-telecentric optical system
1× to 4× zoom
Low-magnification wide-field mode
High-magnification high-resolution mode
Fully automated XY and Z measurement
Automatic 3D measurement stitching
Motorized XY stage
Motorized Z stage
Designed to work with the VR-5000 controller

Key Specifications

Manufacturer: KEYENCE
Model: VR-5200
Product Type: Wide-Area 3D Measurement System Head
Controller: KEYENCE VR-5000
Measurement Technology: Non-contact optical 3D measurement
Measurement Light: White LED
Observation Light: Red / Blue / Green LED ring light
Image Sensor: 4-megapixel monochrome CMOS
Zoom: 1×–4×
Working Distance: 75 mm
Height Display Resolution: 0.1 µm
Height Measurement Accuracy: ±2.5 µm without Z stitching
Height Measurement Accuracy: ±4.0 µm with Z stitching
Height Measurement Repeatability: 0.4 µm without Z stitching
Width Measurement Accuracy: ±5 µm in low magnification
Width Measurement Accuracy: ±2 µm in high magnification
Width Measurement Repeatability: 1 µm low magnification / 0.5 µm high magnification
XY Measurable Range: 206 × 104 mm with required expansion module
XY Stage Stroke: 184 × 88 mm
Z Stage Stroke: 73 mm
Maximum Load: 4.5 kg
Measurement Head Weight: Approximately 11 kg
Complete System Weight: Approximately 28 kg
Power Supply: 100–240 VAC, 50/60 Hz
Measurement Range

The VR-5200 provides different measurement fields depending on magnification.
Low Magnification
12×: 24.0 × 18.0 mm
25×: 12.0 × 9.0 mm
38×: 8.0 × 6.0 mm
50×: 4.5 mm field
High Magnification
40×: 7.6 × 5.7 mm
80×: 3.8 × 2.9 mm
120×: 2.5 × 1.9 mm
160×: 1.4 mm field

Applications

The KEYENCE VR-5200 is suitable for:
3D dimensional inspection
Surface profile measurement
Height measurement
Step measurement
Contour measurement
Flatness inspection
Surface shape inspection
Precision component inspection
Manufacturing quality control
Automotive component inspection
Electronic component inspection
Semiconductor-related component inspection
Precision machining inspection
Research and development
Industrial measurement

What is the KEYENCE VR-5200?
The VR-5200 is the measurement head of the KEYENCE VR-5000 Wide-Area 3D Measurement System.

Is the VR-5200 a 3D scanner?
Yes. KEYENCE places the VR series within its 3D Scanner product lineup, although the VR-5200 itself is specifically the measurement head of the complete system.

What controller does the VR-5200 use?
The VR-5200 is designed to work with the KEYENCE VR-5000 controller.

What is the measurement accuracy?
Under KEYENCE’s specified measurement conditions, height measurement accuracy is ±2.5 µm without Z stitching and ±4.0 µm with Z stitching. Width measurement accuracy can reach ±2 µm in the high-resolution configuration.

Is the VR-5200 discontinued?
Yes. KEYENCE currently identifies the VR-5200 as discontinued and recommends the VR-6200 as a replacement.

Is it suitable for industrial inspection?
Yes. It is designed for high-precision non-contact 3D measurement and is suitable for industrial dimensional inspection and quality control.